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PURA Plus trace moisture even sensor from Michell Instruments
Michell Instruments its trace moisture event sensor, PURA plus. The PURA plus is an on-line trace moisture event sensor designed for UHP inert gas applications in semiconductor fabs to allow installation at multiple locations at the final point of entry to the process tool. Installed in the gas distribution system the PURA plus provides indication of a moisture event as low as 20 ppb at 1 ppb baseline, in less than a minute.
To achieve this high speed of response while maintaining sensitivity, Michell have invented a unique detection algorithm and combined it with a new developed UHP suitable ceramic sensor design. It allows the PURA plus to meet the particulate shedding performance required by the semiconductor industry.
The PURA plus meets the highest quality standards for material and surface finish. It is assembled and packed in a class 100 clean room environment. Prior to packaging Michell leak tests PURA plus do 10-9 bar / sec Pura Plus is designed to operate reliably and without any maintenance for a minimum of 2 years. Information is output via MODBUS, with warning and alarm status being indicated with a “Traffic Light” status indicator LEDS. Further development will add a 4-20 mA output to the instrument.